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FUNDAMENTALS OF MICROFABRICATION : THE SCIENCE OF MINIATURIZATION.

MADOU, MARC J.

FUNDAMENTALS OF MICROFABRICATION : THE SCIENCE OF MINIATURIZATION. - 2nd ed. 2002 - BOCA RATON CRC PRESS / TAYLOR AND FRANCIS - 723

Subjects--Topical Terms:
MICROFABRICATION

Dewey Class. No.: 621.38152.38152 / MAD

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