MADOU, MARC J. <br/><br/>
FUNDAMENTALS OF MICROFABRICATION : THE SCIENCE OF MINIATURIZATION. 

 - 2nd ed.  2002 
 - BOCA RATON  CRC PRESS / TAYLOR AND FRANCIS 
 - 723 
<br/><br/><label>Subjects--Topical Terms: </label><br/>  MICROFABRICATION
<br/><br/><label>Dewey Class. No.: </label>621.38152.38152  / MAD