| 000 | 00500nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 220901s9999 xx 000 0 und d | ||
| 041 | _a ENGLISH | ||
| 082 | _a621.38152.38152 | ||
| 082 | _bMAD | ||
| 100 | _aMADOU, MARC J. | ||
| 245 | 0 | _aFUNDAMENTALS OF MICROFABRICATION : THE SCIENCE OF MINIATURIZATION. | |
| 250 | _a2nd ed. | ||
| 250 | _b2002 | ||
| 260 | _aBOCA RATON | ||
| 260 | _bCRC PRESS / TAYLOR AND FRANCIS | ||
| 300 | _a723 | ||
| 650 | _a MICROFABRICATION | ||
| 942 | _cREF | ||
| 999 |
_c136066 _d136066 |
||