| 000 | 00457nam a2200181Ia 4500 | ||
|---|---|---|---|
| 008 | 220902s9999 xx 000 0 und d | ||
| 041 | _a  ENGLISH | ||
| 082 | _a004.165.165 | ||
| 082 | _bHSU | ||
| 100 | _aHSU, TAI-RAN | ||
| 245 | 0 | _aMEMS AND MICROSYSTEMS : DESIGN AND MANUFACTURE. | |
| 250 | _b2010 | ||
| 260 | _aNEW DELHI | ||
| 260 | _bTATA MCGRAW-HILL PUB. CO. LTD. | ||
| 300 | _a436 | ||
| 650 | _a  MEMS MICROSYSTEM | ||
| 942 | _cTB | ||
| 999 |
_c141487 _d141487 |
||